The plane carrying the Cuban president with his spouse and the delegation landed at around 18:30 GMT at Vnukovo International Airport in Moscow.
Diaz-Canel was welcomed by a military orchestra, which performed the Cuban and Russian anthems.
The visit will include negotiations between the two heads of state and the opening of a monument to Fidel Castro who led the Cuban Revolution and was the leader of Cuba from 1953 to 2008.